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Teledyne DALSA adds 32K Linea ML camera at 150 kHz line rate

Teledyne DALSA extends its Linea ML family with a 32K line scan camera at 150 kHz, 2.5 µm pixel pitch, and a Camera Link HS CX4 optical interface for EMI immunity, targeting single-pass 300 mm wafer inspection.

By Amara Osei3 min read601 words

Features

  • 32,768 pixels per row with 2.5 µm pixel pitch
  • Maximum line rate of 150 kHz
  • Single camera spans a 300 mm wafer edge-to-edge
  • Multiline CMOS supports single, dual, trilinear, and quadlinear modes
  • Camera Link HS CX4 interface via active optical cable for EMI immunity

Line scan imaging at 32,768 pixels per row and a 150 kHz maximum line rate defines Teledyne DALSA's new Linea ML 32K camera. The 2.5 µm pixel pitch and Camera Link HS CX4 interface position the unit for single-camera inspection of 300 mm semiconductor wafers and large-format electronics panels.

How does the multiline CMOS sensor work?

The sensor's multiline architecture stacks independent charge-collection rows under each pixel column. Firmware reassigns those rows in the field to deliver single-line monochrome, dual-line time-differential, trilinear RGB, or quadlinear multispectral capture, all from the same device.

Multiline CMOS replaces the time-delay-and-integration (TDI) architecture used in earlier line-scan cameras for low-light work. Unlike TDI, which sums exposures across rows of the same scene, multiline sensors expose independent rows in a single pass, giving the system reconfigurable colour or sensitivity modes without an external filter wheel.

The 32k variant extends the existing 8k and 16k Linea ML family with quantum-efficiency curves that Teledyne DALSA states are tuned for current and future machine-vision workloads.

What does 2.5 µm pixel pitch change for inspection?

A 2.5 µm pixel reduces the optical footprint of each defect site. A single 32k camera spans a 300 mm wafer edge-to-edge in one pass, removing the stitching artefacts and field-flatness corrections that come from overlapping two narrower line scans.

Teledyne DALSA does not publish modulation transfer function at the Nyquist limit, so buyers should request measured MTF data under their actual illumination bandpass and lens numerical aperture before qualifying the unit for high-magnification defect review.

How does sequential exposure improve detectability?

Sequential exposure captures successive line sets at different integration times within a single scan, merging them into one high dynamic range composite. The technique preserves contrast on highly reflective metal layers without losing low-amplitude features in adjacent dielectric regions.

In line-scan operation, where integration time sets both the maximum scan speed and the saturation threshold, HDR is the principal lever for handling mixed-reflectivity surfaces that combine bright metal with low-contrast dielectric in the same field of view.

Teledyne DALSA pairs the feature with an on-sensor HDR mode the company says raises the probability of catching sub-pixel defects a single-exposure line scan would clip into the noise floor.

What does the Camera Link HS CX4 interface deliver?

The CX4 connector carries the Camera Link HS protocol over active optical cable, breaking the 10-metre ceiling that constrains copper CL HS links. Optical transmission removes conducted and radiated EMI pickup, a recurring cause of row-correlated noise in fab environments where high-power switching equipment operates near imaging stations.

Teledyne DALSA cites complete EMI immunity as a design goal rather than a measured specification; integrators should validate it on-site with their own tool set.

A practical baseline test compares row-noise variance on a quiet optical bench against variance measured during nearby switching events, with the camera in production firmware and the chosen active optical cable assembly.

What adoption question does the 32k format raise?

Raw throughput at 150 kHz with 32,768 8-bit pixels reaches roughly 4.9 GB/s; HDR modes at 10- or 12-bit depth push that figure higher in proportion to the selected pixel width. Facilities must size frame grabbers, fibre backbones, and storage to match.

They must also confirm the camera's compliance with SEMI vision standards and the cleanliness protocols that govern 300 mm wafer handling — a question Teledyne DALSA's announcement leaves to the buyer.

via teledynevisionsolutions.com (Original)

Filed under

  • line-scan-camera
  • machine-vision
  • semiconductor-inspection
  • multiline-cmos
  • teledyne-dalsa
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Amara Osei

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Senior reporter covering industry trends and analytics at Testbench Report.

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